Field Service Solutions

Copyright © 2004 Enigma, Inc.

Friday, November 28, 2003

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Title

Content Type

Product

Author

Release Date

Preventative Maintenance Manual Overview

Engineering Manual

CVD

Tech Docs

15Jan02

PM Procedures - ENI462

Vendor Procedure

CVD

Novellus

15Jan02

Deposition chamber maintenance technique

Technical Training

CVD

Tech Docs

15Jan02

Post-PM Inventory Check

Known Method

CVD

Novellus

11Jun03

No maintenance performed in the last 24 hours

Description

Part Number

Sub Assembly #2

16-Bit Bus Tri-State Transceiver

Octal Buffer Line Driver

Hex Schmitt-Trigger Inverters

Low Voltage Quad 2 Input And Gate

8 or 16 Megabit Flash Memory

Quad 1 to 4 Clock Drivers

40 MHz Oscillator

28-bit Channel Link 66MHz

ACEX 1k Device

Configuration EPROM

Titanium Coupling

Adjustable Positive Voltage Regulator

Sub Assembly #3

1:5 Differential Clock Driver

ECL 2:8 Differential Fanout Buffer

ECL 1:4 1/2 Clock Fanout Buffer

50-125MHz PECL input/9 CMOS output PLL clock driver

11-Bit Switching Bus Tranceiver

1.6 To 2.5 GBPS Transceiver

PECL Oscillator

Virtex II Field Programmable Gate Array

 

74ABTE16245DL

IDT74FCT3244Q

SN74LV14AD

74LVQ08SC

AM29LV116DT120EC

CGS2535V

CB3LV-3C-40.0000-T

DS90CR285MTD

EP1K50QC208-2

EPC2LC20

88-84-5094

LT1083CP

 

MC100EP14DT

MC100LVE310FN

MC100LVEL37DW

PCK953BD

SN74ABTE16246DL

TLK2501IRCP

F1139BA

XC2V3000-ABF957

JEUYTS509-9HEY

AS MAINTAINED BILL OF MATERIALS - 364462

Installation - PM - CM - Retrofit

SUPPORTING DOCUMENTS - 364462

Event - 24 HOURS - 48 hours - Week - Month

PASSDOWN - 364462

Tool Online

Notices / Safety

NOTICES - 364462

20Nov03

Slit valve retrofit available

14Nov03

Reduced cost for 200mm CVD PM kit


MACHINE STATUS - 364462