Title | Content Type | Product | Author | Release Date |
Preventative Maintenance Manual Overview | Engineering Manual | CVD | Tech Docs | 15Jan02 |
Vendor Procedure | CVD | Novellus | 15Jan02 | |
Deposition chamber maintenance technique | Technical Training | CVD | Tech Docs | 15Jan02 |
Post-PM Inventory Check | Known Method | CVD | Novellus | 11Jun03 |
No maintenance performed in the last 24 hours |
Description | Part Number |
Sub Assembly #2 16-Bit Bus Tri-State Transceiver Octal Buffer Line Driver Hex Schmitt-Trigger Inverters Low Voltage Quad 2 Input And Gate 8 or 16 Megabit Flash Memory Quad 1 to 4 Clock Drivers 40 MHz Oscillator 28-bit Channel Link 66MHz ACEX 1k Device Configuration EPROM Titanium Coupling Adjustable Positive Voltage Regulator Sub Assembly #3 1:5 Differential Clock Driver ECL 2:8 Differential Fanout Buffer ECL 1:4 1/2 Clock Fanout Buffer 50-125MHz PECL input/9 CMOS output PLL clock driver 11-Bit Switching Bus Tranceiver 1.6 To 2.5 GBPS Transceiver PECL Oscillator Virtex II Field Programmable Gate Array |
74ABTE16245DL IDT74FCT3244Q SN74LV14AD 74LVQ08SC AM29LV116DT120EC CGS2535V CB3LV-3C-40.0000-T DS90CR285MTD EP1K50QC208-2 EPC2LC20 88-84-5094 LT1083CP
MC100EP14DT MC100LVE310FN MC100LVEL37DW PCK953BD SN74ABTE16246DL TLK2501IRCP F1139BA XC2V3000-ABF957 JEUYTS509-9HEY |
AS MAINTAINED BILL OF MATERIALS - 364462
Installation - PM - CM - Retrofit
SUPPORTING DOCUMENTS - 364462
Event - 24 HOURS - 48 hours - Week - Month
PASSDOWN - 364462
Tool Online
Notices / Safety
NOTICES - 364462
20Nov03 | Slit valve retrofit available |
14Nov03 | Reduced cost for 200mm CVD PM kit |

MACHINE STATUS - 364462