PM Procedure

Description

Part Number

Sub Assembly #2

16-Bit Bus Tri-State Transceiver

Octal Buffer Line Driver

Hex Schmitt-Trigger Inverters

Low Voltage Quad 2 Input And Gate

8 or 16 Megabit Flash Memory

Quad 1 to 4 Clock Drivers

40 MHz Oscillator

28-bit Channel Link 66MHz

ACEX 1k Device

Configuration EPROM

Titanium Coupling

Adjustable Positive Voltage Regulator

Sub Assembly #3

1:5 Differential Clock Driver

ECL 2:8 Differential Fanout Buffer

ECL 1:4 1/2 Clock Fanout Buffer

50-125MHz PECL input/9 CMOS output PLL clock driver

11-Bit Switching Bus Tranceiver

1.6 To 2.5 GBPS Transceiver

PECL Oscillator

Virtex II Field Programmable Gate Array

74ABTE16245DL

IDT74FCT3244Q

SN74LV14AD

74LVQ08SC

AM29LV116DT120EC

CGS2535V

CB3LV-3C-40.0000-T

DS90CR285MTD

EP1K50QC208-2

EPC2LC20

88-84-5094

LT1083CP

MC100EP14DT

MC100LVE310FN

MC100LVEL37DW

PCK953BD

SN74ABTE16246DL

TLK2501IRCP

F1139BA

XC2V3000-ABF957

JEUYTS509-9HEY

PM Procedure for CVD Tool

Bi-Weekly Slit Valve PM

This PM is performed on a Bi-Weekly Basis on 300mm systems only (200mm tools do not need Bi-Weekly PMs). The associated checksheet in the Appendix is completed during the PM.

1. Gather all tools, parts, LOTO devices, and consumables.

2. Log tool to 'PM' and identify Bi-Weekly Slit Valve PM as the procedure.

3. Notify production to get required qual wafers prepared.

4. Update Passdown and the indicate tool status as 'PM-Down'.

5. Notify all "affected" and "other" persons of intended lockout. more...

Part Number	Description	Quantity
22-123217-00	O-ring, L-motion Gate	1
20-123267	Gate, Slit Valve	1
15-050160-15	Process Injector Tube	8
88-84-5094	Titanium Coupling	2
09-09-4985	40 MHz Oscillator	3
34-48-3335	Reference Electrode	2

20Nov03	Slit valve retrofit available
14Nov03	Reduced cost for 200mm CVD PM kit




Field Service Solutions
Copyright © 2004 Enigma, Inc.

				Friday, November 28, 2003