Field Service Solutions

Copyright © 2004 Enigma, Inc.

Tuesday, December 9, 2003

Feedback

ID #

Fab

Process

Vendor

Status

Owner

Vendor Owner

990621

4

CMP

Novellus

Up/26-Nov-03

689726

4

CMP

Novellus

Down(T)/27-Nov-03

JE Lee

Steve Vaughn

597846

6

CVD

KLA

Down(Ch)/ 22-Nov-03

Francis Zapah

Alex Zivojinovic

364462

4

PECVD

Novellus

Up/08-Nov-03

PASSDOWN


*** The Last Mile in Field Service ***

27Nov03

Inspection Logs for Tool 364462 not complete

20Nov03

Tool 364462 down

12Nov03

Parts ordered insufficient to complete PM

Date

Cycle Time

Hours

Labor $

Mat. $

MTTR

PM / CM

MAINTENANCE HISTORY

20Nov03

Slit valve retrofit available

15Nov03

Over-tightening of gas fitting #234-0987 may result in leak

26Oct03

Controller board may short out

04Aug03

Reduced cost for 200mm CVD PM kit

Week - Month - Quarter - Year

MACHINE MAINTENANCE PROFILE

MACHINES - Parts - Products - Teams

MY MACHINES

Notifications / Escalations

ALERTS

Event - 24 hours - 48 hours - Week - Month

Notices / Safety

NOTICES - All Machines