Field Service Solutions

Copyright © 2004 Enigma, Inc.

Tuesday, December 2, 2003

Feedback

02Dec03

Tool taken offline to perform quarterly PM. On inspection of Loadlock, found excessive wear on the O-rings. Ordered O-rings from local depot.

02Dec03

JE Lee

Should include a step to check for wear on Loadlock O-rings

Part Number

Description

Quantity

22-123217-00

O-ring, L-motion Gate

1

20-123267

Gate, Slit Valve

1

15-050160-15

Process Injector Tube

8

88-84-5094

Titanium Coupling

2

09-09-4985

40 MHz Oscillator

3

34-48-3335

Reference Electrode

2

Bi-Weekly Slit Valve PM

7. Close all process gas (SiH4, NF3, SiH4/PH3) quarter turn valves located in the tool gas box. Apply lockout device, locks, and tags to each valve.

8. Shut down both Turbo pumps.

a) From the SCVD screen, click on the Turbo pump icon and select ‘Stop Turbo’ for both turbo pumps.

b) Wait until the turbo has slowed to less than 300 Hz, and then secure the N2 ballast to both turbo pumps from the SCVD screen as follows:

Close vl32 ­ ‘VC7, Turbo pump N2 Supply.

Close vl38 ­ ‘VTR, Turbo Roughing Valve.

c) Open the black manual vent valve on the turbo pump body.

d) Wait until the turbos have come to a complete stop. Close the black manual vent valve on the turbo pump body.

9. Click on “brkhalt” command from the scroll down menu of the Brooks robot to deservo. Record residual amount of RF in system.

10. Vent the TM chamber to atmosphere.

11. Turn off the RF generators (High Frequency RF and Low Frequency RF) using the circuit breaker switches located on the single source drop (SSD). Apply lockout device, locks, and tags to each breaker switch.

12. Check RF generator outlets located on the SSD with a standard multi meter to verify electrical energy is off.

13. Apply lockout device, locks, and tags to Turbo pump controller.