Field Service Solutions

Copyright © 2004 Enigma, Inc.

Friday, December 12, 2003

12Dec03

Replaced match with on-site part. RF power decreased to within spec.

11Dec03

Based on input, checked to ensure coil was in auto-tune mode, and match was tuned correctly. Match bad, will replace.

10Dec03

Chamber C offline. Checked RF path and all connections tight. Not sure what problem is, searched knowledge base and found similar issues at Fab 4B and 4C. Will perform tests to determine relevancy and talk to guys in 4B/4C.

09Dec03

Heads up- spec drift indicates RF problem in chamber C; Fault #3RFT5. OCAP procedures followed, still indicates high reflected power.

Feedback

Date

Cycle Time

Hours

Labor $

Mat. $

MTTR

10Dec03

2 days

12

1.9

0.6

X

02Dec03

2 days

12

2.5

X

08Nov03

1 day

2

0.2

0.1

X

23Oct03

4 days

12

1.9

0.6

X

09Sep03

32 days

235

24.8

7.2

X

07Jun03

3 days

28

4.2

0.3

X

19Apr03

7 days

16

2.1

X

14Apr03

5 days

35

4.7

X

17Mar03

2 days

8

1.0

4.0

X

I / PM / CM / R

MAINTENANCE HISTORY

CMSE #7852

CM CONTRIBUTORS

CMSE #7852

DOCUMENTS USED

RF Match - Part # 29-08-5947

PARTS USED / RETURNED

CMSE #7852

Machine Online

Jim Hendricks, 654887

David Evans 867758

Oliver Kahn, 237785

Saul Hudson, 498675

Gerhard Schroeder, 958473

Lawrence Carlton, 968467

Felix Magath, 992344

Alex Zivojinovic, 786452

RF Match Replacement procedure # RF015

Corrective Maintenance #364GMA


MACHINE MAINTENANCE PROFILE - 364462

Log

Date

Entry

Symptom

09Dec03

RF-related Spec drift in Ch C

Symptom

09Dec03

High reflected power

Known

09Dec03

Fault Code 3RFTS

Known

10Dec03

Connections tight along RF path

Known

10Dec03

Fabs 4B & 4C had match problems in September & October

Known

11Dec03

Coil in Auto Tune mode

Known

11Dec03

Match tuned correctly

Delta

12Dec03

Vendor inventory contains some sub-standard second source matches

Root Cause

11Dec03

Bad match

Solution

12Dec03

Replace RF match: procedure # RF015

Confirmation

12Dec03

RF power within spec

12Dec03

Replaced match with on-site part. RF power decreased to within spec.

11Dec03

Based on input, checked to ensure coil was in auto-tune mode, and match was tuned correctly. Match bad, will replace.

10Dec03

Chamber C offline. Checked RF path and all connections tight. Not sure what problem is, searched knowledge base and found similar issues at Fab 4B and 4C. Will perform tests to determine relevancy and talk to guys in 4B/4C.

09Dec03

Heads up- spec drift indicates RF problem in chamber C; Fault #3RFT5. Inspection procedures followed, still indicates high reflected power.

PASSDOWN - 364462

Event - 24 HOURS - 48 hours - Week - Month

Week - Month - Quarter - YEAR

TROUBLESHOOTING NETWORK

CMSE #7852


MACHINE STATUS - 364462