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Field Service Solutions | ||||||||
Copyright © 2004 Enigma, Inc. | ||||||||
Wednesday, December 10, 2003 | ||||||||
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Title | Content Type | Product | Vendor | Date |
CM Event #938 | Trouble ticket | CVD | Novellus | 30Oct03 |
CM Event #1132 | Trouble ticket | CVD | Novellus | 23Nov03 |
CM Event #1285 | Trouble ticket | CVD | Applied | 16Dec02 |
CM Event #335 | Trouble ticket | CVD | KLA | 11Jan03 |
SUPPORTING DOCUMENTS - 364462
Log | Date | Entry |
Symptom | 09Dec03 | RF-related Spec drift in Ch C |
Symptom | 09Dec03 | High reflected power |
Known | 09Dec03 | Fault Code 3RFTS |
Known | 10Dec03 | Connections tight along RF path |
Known | 10Dec03 | Fabs 4B & 4C had match problems in September & October |
TROUBLESHOOTING NETWORK
10Dec03 | Chamber C offline. Checked RF path and all connections tight. Not sure what problem is, searched knowledge base and found similar issues at Fab 4B and 4C. Will perform tests to determine relevancy and talk to guys in 4B/4C. |
09Dec03 | Heads up- spec drift indicates RF problem in chamber C; Fault #3RFT5. Inspection procedures followed, still indicates high reflected power. |
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09Dec03 09:47 | 3RFTS - reflected power |
FAULT LOG - 364462
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PASSDOWN - 364462
Event - 24 HOURS - 48 hours - Week - Month
Installation - PM - CM - Retrofit
CMSE #7852
Chamber C Offline
MACHINE STATUS - 364462